chamber cleaning meaning in English

反应室清除

Convenient : it provide operators with convenience by air inlet adjustment , timing control , shelf movement and easy chamber cleaning
方便：风门调节，定时控制、搁板移动箱内清洗、处处使操作者感到方便。
The implementation of fluorine generation technology for chemical vapor deposition ( cvd ) chamber cleaning applications poses significant new challenges with regard to safety , reliability , purity and overall cost of ownership
摘要对于将氟气应用在化学气相沉积器清洗的应用而言，其安全性、稳定性、纯度和价格，在应用上是一个新的挑战。
An integrated fluorine supply strategy has been demonstrated to be the most effective means of implementing a safe and reliable fluorine supply to users seeking a low - cost replacement for standard chamber clean chemistries
对一般气相沉积反应器清洗而言，一体化氟气供应策略，对寻求低价取代方案的使用者而言，是最安全和稳定的供应方式。